QO 40A1 QUARZ BALANCE, TM13/TM14 THICKNESS MONITOR SENSORS & TMC-13 CONTROLLER
incl. VAT, plus shipping
Delivery Time 2 - 3 Weeks
The TM13 and TM14 devices comprise: quartz oscillator, frequency measuring system and communication interface. It is connected to the input element of a quartz resonator. The measurement results are transmitted via RS232 to the master device: either a PC or TMC13 controller. Remote control via TMC13 controller or PC. Manufactured by PREVAC
Product DESCRIPTION
QO 40A1 QUARZ BALANCE
The Quartz Balance QO 40A1 instrument provides a real-time, continuous indication of coating thickness during deposition, allowing the production of coatings of high accuracy and reproducibility. The thickness of both evaporated and sputter coated films can be monitored. The sensor head placed in non-magnetic housing is water cooled. The crystal face is parallel to the water-cooling feedthrough pipes. The Quartz balance QO 40A1 is mounted on a DN 40CF flange with two Ø6 pipes and Microdot S-50 coaxial connector. Customized insertion length 130 - 500 mm (other on request).
FEATURES
· Water-cooled sensor head
· Easy exchangeable quartz
OPTIONS
· Customised insertion length
· With or without integrated manual/electro-pneumatic shutter
· Different mounting flanges (e.g. DN40KF)
· Other quartz balance geometries on request (e.g. perpendicular head geometry)
· Linear shift
TM13/TM14 THICKNESS MONITOR SENSORS
The TM13 and TM14 devices comprise: quartz oscillator, frequency measuring system and communication interface. It is connected to the input element of a quartz resonator.
The measurement results are transmitted via RS232 to the master device: either a PC or TMC13 controller.
Remote control via TMC13 controller or PC.
FEATURES
TM13:
· Frequency Resolution: 0.1Hz
· Number of measurements per second: 4 (fixed)
· Maximum frequency of quartz oscillator: 6 MHz
· Stability: 0.5 ppm
TM14:
· Frequency Resolution: 0.01 Hz
· Number of measurements per second: 0.5, 1, 2, 4, 10 (selectable)
· Maximum frequency of quartz oscillator: 6 MHz
· Stability: 0.5 ppm
TMC-13 THICKNESS MONITOR CONTROLLER
The TMC13 Thickness Monitor Controller is the newest technology electronics designed for monitoring and controlling any coating and deposition processes. Up to six channels
inputs and two additional vacuum gauge channels together with 7’’ TFT display makes this unit really unique and universal. Sensor inputs can be assigned to different materials with individual parameters as well. High speed and high accuracy measuring process controlled by DSP processor improves the film quality and repeatability. It brings also the features of accuracy, stability and instrument configuration. The unit is equipped with autosave function (the device saves your parameters, pre-set and apply them automatically after restart).
FEATURES
· Up to 6 channels for TM sensors with quartz balances
· 2D real time chart module
· Compact design
· Two inputs for most active vacuum gauges
· Up to 8 shutter and I/O reprogrammable
· Relay outputs
· Two reprogrammable analog outputs for rate and thickness monitoring with 16 bits resolution
· Frequency resolution 0.1 Hz (for TM13) or 0.01 Hz (for TM14)
· Operation of up to two multi-crystal sensor heads (pneumatic or stepper motor)
· LabVIEW libraries
· Easy firmware upgrade via USB
Product Details
QO 40A1 QUARZ BALANCE
TECHNICAL DATA
Mounting Flange: DN 40 CF (rotatable)
Max operation temperature: up to 300 °C (with water cooling)
Water cooling (required): water flow >0.5 l/min; temperature: 20 - 30 °C; max pressure: 6 bar
Crystal frequency: 4.8 - 6 MHz, 14 mm diameter (industry standard)
Insertion length: dependent on specification and geometry of the chamber
Bakeout temperature: up to 150 °C
TM13/TM14 THICKNESS MONITOR SENSORS
TECHNICAL DATA
Power supply: 5V DC
Current consumption: max 500 mA
TM13 TM14
Thickness resolution TM13: 0.1 Å TM14: 0.01 Å
Rate resolution TM13: 0.1 Å/s TM14: 0.01 Å/s
Frequency resolution TM13: 0.1 Hz TM14: 0.01 Hz
Frequency stability TM13: 0.5 ppm TM14: 0.5 ppm
Number of measurements per second TM13: 4 TM14: 0.5; 1; 2; 4; 10 (selectable)
Communication interface: RS232
Dimensions: 80.0 x 50.0 x 27.0 mm (WxHxD)
Weight (approx.): 0.1 kg
OPTIONS
· Communication interface RS485 (specify at order)
TMC-13 THICKNESS MONITOR CONTROLLER
TECHNICAL DATA
Supply voltage: 100-240 VAC, 50/60 Hz (power consumption max 100 W)
TM sensor inputs channels: 6
Thickness: 0 - 9999000 Å
Rate: 0 - 9999 Å
Compatible sensors (two channels):
CTR90, TTR91, TTR211, PTR225, PTR90,
ITR90, ITR100, Baratron, ANALOG IN, MKS937A, PG105, MG13/14, PKR251/360/361, PCR280, ATMION
Frequency resolution: TM13: 0.1 Hz TM14: 0.01 Hz
Frequency range: 2 - 6 MHz
Thickness resolution: TM13: 0.1 Å TM14: 0.01 Å
Rate resolution: TM13: 0.1 Å/s TM14: 0.01 Å/s
Frequency stability: TM13: 0.5 ppm TM14: 0.5 ppm
Tooling factor: 1-400 %
Measurement units: Å, kÅ, nm
Measurement period: 100 ms - 2 s (depend on TM type)
Shutter control: manual, time, thickness
Shutter time: 1 - 1000000 s
Pressure channels inputs: 2
Measurement Units: mbar, Pa, Torr, psia
Degas Time: 1 - 3 min
Outputs: 8 relay outputs (2 outputs with COM NC and NO contacts); 2 analog outputs:0-10V retransmission thickness, rate, pressure)
Inputs: 4 digital inputs (in 24V logic)
Communication interface: RS232/485, Ethernet
Communication protocol: MODBUS-TCP
User Interface: 7‘‘TFT display with touchscreen
Interface languages: English, German, Polish
Dimensions: 212.6 × 128.4 × 260.9 mm (W×H×D)
Weight (approx.): 3 Kg
Operation of up to two multi-crystal sensor heads
· operate your multi-crystal sensor head as easily as one single crystal
· control each single crystal separately
Crystal heads configuration (see download Brochure TMC13)