IS 40E1 ION SOURCE & POWER SUPPLY SET
incl. VAT, plus shipping
Delivery Time 2 - 3 Weeks
The IS 40E1 ion source is a two lens, extractor type, focused, differentially pumped ion gun. The source is able to raster a 10 mm x 10 mm area of the surface at the recommended working distance. It is particularly suitable for depth profiling in XPS, ISS and SIMS. The source can be also used for sample surface cleaning.
Includes:
- Ion Source IS 40E1
- Ion Source power supply IS40-PS, 100-240V, with 7.5m cable
and communication interface RS-232/485 and Ethernet IP
- Mains cable with EURO or UK or JP/USA plug"
- Licence for control application for IS40-PS power supply
Manufactured by PREVAC
Product DESCRIPTION
The IS 40E1 ion source is a two lens, extractor type, focused, differentially pumped ion gun.
The source is able to raster a 10 mm x 10 mm area of the surface at the recommended working distance. It is particularly suitable for depth profiling in XPS, ISS and SIMS. The source can be also used for sample surface cleaning.
Features
· Specially configured nose cone
· Operation with inert (Ar) & reactive gases (O2, H2, hydrocarbons with reduced lifetime)
· Continuously variable spot size
· Extremely homogeneous crater/beam profile
· Onside replaceable filament
· UHV gas inlet
· UHV conditions maintained in chamber
· Correction of incident electron beam angle (provided by IS40-PS power supply)
Options
· Wien mass filter
· Gas dosing system
· Linear shift: 25, 50, 75, 100 mm
· Differential pumping (2 stages)
IS40-PS
ION SOURCE POWER SUPPLY
(IS 40E1 mode)
DESCRIPTION
The IS40-PS power supply drives the IS40E1 Scanning Ion Source. It allows fine adjustment of the primary beam energy, ion density and beam profile (by adjustment of extractor, focus lenses, deflection and positioning elements). Up to 4 parameters can be varied via the digital encoder. The current status of each parameter is displayed on the large front panel LCD display. All settings can be manually adjusted or can be stored and recalled automatically after unit switch on. The unit also features a built-in timer and automatic standby mode. Easy firmware update via USB port. Unit can be remotely controlled via RS232/485 or Ethernet interfaces. Autosave function for saving your parameters/unit preset and applying them automatically after restart.
Wien filter option available.
OPTIONS
- Software control (Version Pro, Extended or Library module)
- Analog I/O card for vacuum measurement (1 gauge)
Product Details
IS 40E1 Ion Source
TECHNICAL DATA
Mounting flange: DN 40CF (rotatable)
Gases: Ar and reactive gases (O2, H2 hydrocarbons with reduced lifetime)
Energy range: 0.15 keV - 5 keV
Scan area: 10 mm x 10 mm (for working distance of 23 mm)
Current density: up to 4 mA / cm2 (for distance 23 mm)
Beam current: > 1 μA (for distance 23 mm)
Cathode type: yttrium oxide coated iridium filament
Small cone angle: 50°
Insertion length: 163 mm (standard)
FWHM: dependent on working distance (e.g. < 150 μm for distance 23 mm)
Typical working distance: 23 - 120 mm
Bakeout temperature: 250 °C
Working pressure: 10-8 mbar (with max beam current)
IS40-PS
ION SOURCE POWER SUPPLY
(IS 40E1 mode)
TECHNICAL DATA
Supply voltage: 100V - 240V, 50-60Hz (power consumption max 250W)
Timer: dual mode timer, 0 s - 99 h 59 min
Vacuum measurement (optional): CTR90, TTR91, TTR211, PTR225, PTR90, ITR90, ITR100, Baratron, ANALOG IN, MKS937A, PG105, MG13/14, PKR251/360/361, PCR280, ATMION
User Interface: 7" TFT display with touchscreen, digital encoder
Communication interface: RS232/485, Ethernet
Communication protocol: MODBUS-TCP
Interface languages: English, German, Polish
Dimensions [mm]: 483 x 133 x 437 mm (W x H x D), 19" rack mountable
Beam energy (E): 0 - 5 keV, resolution 0.01 keV, ripple < 0.2 Vpp
Emission current (Ie): 0.01 mA - 10 mA, resolution 0.01 mA
Focus (1,2) voltage: 0 - 5000 V, resolution 1 V, ripple < 0.2 Vpp
Extractor voltage (Ex): 60 - 100% of energy, resolution 0.1%, ripple < 0.2 Vpp
Beam position (Px, Py): -5 mm to 5 mm, resolution 0.01 mm
Scanning area (Δx, Δy): 10 mm x 10 mm, resolution 0.01 mm
Scanning speed (time/dot): 20 μs - 30 ms
Weight (approx.): 12 kg