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Delivery Time 2 - 3 Weeks

Our new electronic unit for deposition process controlling. Operates two independent sources/chambers at the same time. Manufactured by PREVAC

Product Information

we like to introduce our new Deposition Process Controller DPC10 unit for thin film deposition process controlling. The DPC10 can operate two independent sources/chambers at the same time.


The DPC10 Deposition Process Controller is an advanced and complete electronic device designed for the physical vapor deposition process controlling. DPC10 monitors and controls the rate and thickness of thin film deposition. The rate and thickness of the deposition are calculated from the frequency change of the quartz placed in the process chamber. A user-programmed device can control the deposition process in a precise and repeatable manner. User interacts with unit via front panel touchscreen by selecting/entering parameters defining the process. The device executes any recipe created by the user with a graphical editor. In addition, DPC10 works with any voltage-controlled deposition source power supply (via analogue interface) and can control substrate heating process.


The complete system consists of a DPC10 main electronic unit, a vacuum gauge and TM13/14 thickness monitor for each quartz crystal.




- Designed for deposition process automation

- Two independent process loops

- Easily operated recipe editor with graphical interface

- Works with any voltage controlled (via analogue interface) deposition source power supply

- Controls evaporation rate and thickness

- Controls substrate heating process

    Equipped with fast CPU & 7” touchscreen display

    Favourites list of frequently used materials

    2D real time chart module

Technical Details

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Technical data

Supply voltage: 100-240 VAC, 50/60 Hz (power consumption max 43 W)

Inputs: 2 analog Inputs (0-10V), 12 digital Inputs

Outputs: 6 analog outputs (0-10V), 16 digital outputs

Supported thickness monitors: TM13: 0.1 Hz | TM14: 0.01 Hz

Thickness: 0 - 9999000 Å

Rate: 0 - 9999 Å/s

Frequency range: 2-6 MHz

Thickness resolution: TM13: 0.1 Å | TM14: 0.01 Å

Rate resolution:  TM13: 0.1 Å/s | TM14: 0.01 Å/s

Frequency stability: TM13: 0.5 ppm | TM14: 0.5 ppm

Tooling factor: 1 - 400%

Measurement units: Å, kÅ, nm

Measurement period: 100 ms - 2 s (depend on TM type)

Shutter control: manual, time, thickness

Shutter time: 1 - 1000000 s

Supported active gauges: CTR90, TTR91, TTR211, PTR225, PKR251/360/361, PCR280, TPR280/281, PTR90, ITR90, ITR100, Baratron, ANALOG IN, PG105, ATMION, IKR360/361

Measurement units: mbar, Pa, Torr, Psia

Communication interface: RS232/485, Ethernet

User interface: 7″ TFT display with touchscreen

Interface language: English

Dimensions: 212.6 x 128.4 x 266.1 mm (W x H x D)

Weight (approx.): 2.1 kg


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coming soon.....